InAsSb pillars for multispectral long-wavelength infrared absorption

被引:2
|
作者
Goosney, Curtis J. [1 ]
Jarvis, Victoria M. [2 ]
Britten, James F. [2 ]
LaPierre, Ray R. [1 ]
机构
[1] McMaster Univ, Dept Engn Phys, 1280 Main St West, Hamilton, ON L8S 4L7, Canada
[2] McMaster Univ, McMaster Analyt XRay Diffract Facil, 1280 Main St West, Hamilton, ON L8S 4M1, Canada
基金
加拿大自然科学与工程研究理事会;
关键词
Pillar; Indium arsenide antimonide; Molecular beam epitaxy; Long wavelength infrared; Multispectral; MOLECULAR-BEAM EPITAXY; NANOWIRE ARRAYS; SURFACTANT; GROWTH; MORPHOLOGY; GAAS;
D O I
10.1016/j.infrared.2020.103566
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
InAsSb pillars were investigated for multispectral photodetection in the long wavelength infrared (LWIR) region. An InAs0.19Sb0.81 thin film was successfully grown on Si (100) substrate, utilizing an AlSb buffer layer to alleviate the large lattice mismatch. X-ray diffraction studies showed a majority [100] orientation of the as-grown films, with minor orientations arising as a result of twinning. Arrays of InAsSb pillars with diameters ranging from 1700 nm to 4000 nm were fabricated by a top-down reactive ion etching process. The arrays showed resonant optical absorption peaks in the LWIR region from 8 to 16 mu m wavelength, dependent on the pillar diameter. The peak absorptance wavelength increased by 0.46 mu m for each 100 nm increase in pillar diameter, demonstrating the multispectral tunability of such arrays.
引用
收藏
页数:6
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