Highly stable heterodyne interferometer without periodic nonlinearity

被引：8
|
作者：
Hu Pengcheng [1 ]
Chen Peng [1 ]
Diao Xiaofei [1 ]
Tan Jiubin [1 ]
机构：
[1] Harbin Inst Technol, Harbin 150080, Peoples R China
来源：
TM-TECHNISCHES MESSEN | 2014年 / 81卷 / 05期
基金：
高等学校博士学科点专项科研基金; 中国国家自然科学基金;
关键词：
Optics thermal drift; optical path length; periodic nonlinearity; Joo-type heterodyne interferometer; DISPLACEMENT-MEASURING INTERFEROMETER; HIGH-RESOLUTION; ERROR;
D O I：
10.1515/teme-2014-0375
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Recently the Joo-type heterodyne interferometer was invented to overcome the periodic nonlinearity, but there was less discussion about the optics thermal drift of 100-type interferometer. In this paper, the optics thermal drift model of Joo-type interferometer is established, and a highly stable heterodyne interferometer is proposed. Experimental results show that, the proposed interferometer's periodic nonlinearity is 0.035 nm, while its optics thermal drift coefficient is 18 nm/degrees C approximately.
引用
收藏
页码：246 / 254
页数：9
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