PECULIARITIES OF GLOW MODES OF ARGON ATMOSPHERIC PRESSURE RADIO-FREQUENCY CAPACITIVE DISCHARGE WITH ISOLATED ELECTRODES

被引：0
|
作者：
Bazhenov, V. Vu. [1 ]
Tsiolko, V. V. [1 ]
Piun, V. M. [1 ]
Chaplinskiy, R. Yu. [2 ]
Kuzmichev, A. I. [2 ]
机构：
[1] Inst Phys NAS Ukraine, Kiev, Ukraine
[2] Natl Tech Univ Ukraine KPI, Kiev, Ukraine
来源：
PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY | 2013年 / 04期
关键词：
IONIZATION; PLASMA;
D O I：
暂无
中图分类号：
O57 [原子核物理学、高能物理学];
学科分类号：
070202 ;
摘要：
Glow characteristics of capacitive radio frequency discharge with isolated electrodes in low-current alpha and high-current gamma modes are determined experimentally. It is shown that transition from alpha mode to gamma mode occurs through a phase of coexistence of both modes in different parts of the discharge gap.
引用
收藏
页码：171 / 175
页数：5
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