Breakdown mechanism of an atmospheric-pressure radio-frequency capacitive argon discharge in parallel-plate bare metal electrodes

被引：3
|
作者：
Li, Shou-Zhe [1 ]
Wu, Qi [1 ]
Wang, Dezhen [1 ]
Uhm, Han S. [2 ]
机构：
[1] Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Elect Beams, Minist Educ, Sch Phys & Optoelect Technol, Dalian 116023, Peoples R China
[2] Kwangwoon Univ, Kwangwoon Acad Adv Studies, Seoul 137701, South Korea
来源：
PHYSICS LETTERS A | 2011年 / 375卷 / 03期
基金：
中国国家自然科学基金;
关键词：
Electric breakdown; Atmospheric pressure; Radio-frequency; PLASMA SOURCE;
D O I：
10.1016/j.physleta.2010.12.044
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
The breakdown behavior of an atmospheric-pressure radio-frequency capacitively coupled argon plasma discharge at 13.56 MHz is investigated in order to produce a stable and homogeneous atmospheric-pressure argon glow discharge. It is found that the electrode separation distance plays a pivotal role in exciting argon discharge whether in mobility-controlled electric breakdown or in diffusion-controlled breakdown and the discharge mode (arc discharge, alpha-mode glow discharge, or gamma-mode glow discharge) immediately following breakdown is closely related to the breakdown mechanism. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码：598 / 600
页数：3
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