Optical microelectromechanical system array for free-space retrocommunication

被引：3
|
作者：
Lao, CP [1 ]
Goossen, KW [1 ]
机构：
[1] Univ Delaware, Dept Elect & Comp Engn, Newark, DE 19716 USA
来源：
IEEE PHOTONICS TECHNOLOGY LETTERS | 2004年 / 16卷 / 09期
关键词：
free-space retrocommunication; mechanically active antireflection switch (MARS); optical link; optical microelectromechanical system (MEMS);
D O I：
10.1109/LPT.2004.831947
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We demonstrate here an optical link for free-space retrocommunication based on an optical microelectromechanical system array with a structure of mechanically active antireflection switch using a thin Si3N4 membrane. The array consists of 215 identical single devices with a total active area of 36 mm(2) and was fabricated with the normal surface sacrificial micromachining. An overfilled reflectance contrast of 3 dB was observed at 6328 Angstrom and a data rate of 100 kb/s shown in 50 mtorr vacuum. A design tradeoff between the high optical filling factor and the high working frequency is discussed.
引用
收藏
页码：2045 / 2047
页数：3
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