Enhancing the crystallinity and surface roughness of sputtered TiO2 thin film by ZnO underlayer

被引：11

作者：

Huang, Feng ^{[1
,2
]}

Xie, Bin ^{[1
,2
]}

Wu, Bingjun ^{[1
,2
]}

Shao, Lei ^{[1
,2
]}

Li, Ming ^{[1
,2
]}

Wang, Haiqian ^{[1
,2
]}

Jiang, Yousong ^{[3
]}

Song, Yizhou ^{[3
]}

机构：

[1] Univ Sci & Technol China, Hefei Natl Lab Phys Sci Microscale, Hefei 230026, Anhui, Peoples R China

[2] Univ Sci & Technol China, SHINCRON Joint Lab, Hefei 230026, Anhui, Peoples R China

[3] Shincron Co Ltd, Shinagawa Ku, Tokyo 1400011, Japan

来源：

APPLIED SURFACE SCIENCE | 2009年 / 255卷 / 15期

基金：

中国国家自然科学基金;

关键词：

Titanium oxide; Zinc oxide; Photo-catalysis; Sputtering; Super-hydrophilic; PHOTOCATALYTIC ACTIVITY; TEMPERATURE; DEGRADATION; ANATASE; GLASS;

D O I：

10.1016/j.apsusc.2009.02.060

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

TiO2 and TiO2/ZnO double layer films were sputtered on glass substrates. It was found that a thin ZnO underlayer is helpful for tailoring the microstructure and surface morphology of the TiO2 film. By applying a 70-nm-thick ZnO underlayer, a TiO2 thin film of 100 nm in thickness with well crystallized anatase phase and rough surface was successfully fabricated without heating the substrate. Relatively high photo-catalytic activity and good hydrophilic properties were observed in such TiO2/ZnO double layer films. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：6781 / 6785

页数：5

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