Basic deposition process of single crystal/single domain PbTiO3 ferroelectric thin films

被引:0
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作者
Wasa, K [1 ]
机构
[1] Yokohama City Univ, Fac Sci, Yokohama, Kanagawa 2360027, Japan
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中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Thin films of (001)PbTiO3(PT), 5 - 260 nm in thickness, were grown by sputtering on miscut (001) SrTiO3(ST) substrate with miscut angle of 1.7 degrees at 600 degrees C. The PT thin films showed a single domain/single crystal perovskite structure through a large area with a smooth surface on an atomic scale, although the sputtered PT thin films were deformed by the two dimensional compressive force and showed large tetragonality of c/a = 1.1 ae room temperature.
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页码:S122 / S127
页数:6
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