Complex Tooling for Hot Embossing and Injection Molding

被引：2
|
作者：
Stuck, A. [1 ]
Pugin, R. [1 ]
Schnieper, M. [1 ]
Zhurminsky, I. [1 ]
Luu-Dinh, A. [1 ]
Walter, H. [1 ]
机构：
[1] Ctr Suisse Elect & Microtech SA, Neuchatel, Switzerland
来源：
PROCEEDINGS OF THE 7TH INTERNATIONAL CONFERENCE ON MULTI-MATERIAL MICRO MANUFACTURE (4M 2010) | 2011年
关键词：
D O I：
10.3850/978-981-08-65559_IN-002
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Combining Holographic and e-beam origination with UV-lithography allows to manufacture tools which contain in the same tool geometrical features of a few 10nm's, over a few 100nm's and microns with macroscopic, sub-mm features. The total achievable accuracies for the relative positioning of all these structures is in the range of micrometers. Using electroformed Ni it is possible to transfer all these geometries through hot embossing or injection molding into plastic parts with great accuracy. Examples of combinations of sub 100nm structures with sub micron structures and of sub micron structures with sub-mm features are discussed.
引用
收藏
页码：3 / 8
页数：6
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