Eigenvalue Analysis of Roots Type Vacuum Pump Using FE-Method

被引：0
|
作者：
Lee, Jeong-Hoon [1 ]
Lee, Jong-Myeong [1 ]
Ha, Jeong-Min [1 ]
Gu, Dong-Sik [2 ]
Choi, Byeong Keun [1 ]
机构：
[1] Gyeongsang Natl Univ, Dept Energy & Mech Engn, Tongyeong City, South Korea
[2] Changwon Moonsung Univ, Dept Ship Bldg & Marine Engn, Chang Won, South Korea
来源：
PHYSICAL AND NUMERICAL SIMULATION OF MATERIALS PROCESSING VII | 2013年 / 762卷
关键词：
Eigenvalue; vacuum pump; FE-method; structural analysis;
D O I：
10.4028/www.scientific.net/MSF.762.668
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The demand and importance of vacuum pumps are increasing, because the necessity of dry vacuum pump is proven in semiconductor industry. Various types of vacuum pumps have been developed, and in this research a roots type vacuum pump has been analyzed with a variety of mathematical analysis. Analysis of eigenvalue by FEM analysis and Modal Test were performed through the Roots type vacuum pump and using the results of irregular vibration and instability an assessment has been performed.
引用
收藏
页码：668 / +
页数：2
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