Vibratory response modeling and verification of a high-precision optical positioning system

A generic vibratory-response modeling program has been developed as a tool for designing high-precision optical positioning systems. Based on multibody dynamics theory, the system is modeled as rigid-body structures connected by linear elastic elements, such as complex actuators and bearings. The full dynamic properties of each element are determined experimentally or theoretically, then integrated into the program as inertial and stiffness matrices. Utilizing this program, the theoretical and experimental verification of the vibratory behavior of a double-multilayer monochromator support and positioning system is presented Results of parametric design studies that investigate the influence of support floor dynamics and highlight important design issues are also presented. Overall, good matches between theory and experiment demonstrate the effectiveness of the program as a dynamic modeling tool.