Fabrication of low-density solid xenon as laser-produced plasma extreme ultraviolet source

被引：2

作者：

Nagata, Mizuho ^{[1
]}

Norimatsu, Takayoshi ^{[1
]}

Nakai, Mitsuo ^{[1
]}

Nagai, Keiji ^{[1
]}

Ueda, Nobuyoshi ^{[1
]}

Fujioka, Shinsuke ^{[1
]}

Aota, Tatsuya ^{[1
]}

Nishimura, Hiroaki ^{[1
]}

Nishihara, Katsunobu ^{[1
]}

Miyanaga, Noriaki ^{[1
]}

Izawa, Yasukazu ^{[1
]}

Mima, Kunioki ^{[1
]}

机构：

[1] Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 2006年 / 45卷 / 33-36期

关键词：

laser-produced EUV source; low-density solid xenon; atomization; swirl atomizer;

D O I：

10.1143/JJAP.45.L884

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A low-density solid xenon (Xe) target has been developed as laser-produced plasma (LPP) extreme ultraviolet (EUV) source. Xe gas was cooled to below the condensation temperature, and liquid Xe was sprayed from a swirl atomizer into a low-pressure atmosphere. Microparticles of liquid Xe were rapidly cooled by their own latent heat of evaporation, and became a solid micrometer-sized powder. The most frequent particle diameter under an atomizing pressure of 0.3 MPa was 114 mu m, and the apparent density was 0.2 g/cm(3) 1/13 of the density of conventional solid Xe. The apparent production rate of the powder was 2.2 cm(3)/s.

引用

页码：L884 / L886

页数：3

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