共 50 条
- [23] MEMS Accelerometer with SAW 2018 WAVE ELECTRONICS AND ITS APPLICATION IN INFORMATION AND TELECOMMUNICATION SYSTEMS (WECONF), 2018,
- [24] DYNAMICS OF MEMS ACCELEROMETER PROCEEDINGS OF THE 17TH INTERNATIONAL CONGRESS ON SOUND AND VIBRATION, 2010,
- [25] Design and verification of a structure for isolating stress in sandwich MEMS accelerometer MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2021, 27 (05): : 1943 - 1950
- [26] Comb structure analysis of the capacitive sensitive element in MEMS - accelerometer MICRO- AND NANOTECHNOLOGY SENSORS, SYSTEMS, AND APPLICATIONS VII, 2015, 9467
- [27] Autocalibration of MEMS accelerometer 2006 IEEE INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE PROCEEDINGS, VOLS 1-5, 2006, : 519 - +
- [28] Design and verification of a structure for isolating stress in sandwich MEMS accelerometer Microsystem Technologies, 2021, 27 : 1943 - 1950
- [29] Modal analysis of a structure used as a capacitive MEMS accelerometer sensor 2014 11TH INTERNATIONAL CONFERENCE ON ELECTRICAL ENGINEERING, COMPUTING SCIENCE AND AUTOMATIC CONTROL (CCE), 2014,
- [30] Analyse of the structure of high g-force MEMS accelerometer INTERNATIONAL CONFERENCE ON SENSOR TECHNOLOGY (ISTC 2001), PROCEEDINGS, 2001, 4414 : 273 - 275