Group III-nitride-based gas sensors for combustion monitoring

被引:80
|
作者
Schalwig, J [1 ]
Müller, G
Eickhoff, M
Ambacher, O
Stutzmann, M
机构
[1] EADS Deutschland GmbH, Corp Res Ctr, D-81663 Munich, Germany
[2] Tech Univ Munich, Walter Schottky Inst E25, D-85748 Garching, Germany
关键词
gas sensors; GaN; GaN/AlGaN-heterostructures; combustion monitoring;
D O I
10.1016/S0921-5107(02)00050-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The paper reports on novel gas-sensing devices based on group III-nitride materials. Both platinum (Pt)-GaN Schottky diodes as well as high-electron-mobility transistors formed from GaN/AlGaN heterostructures with catalytically active platinum gates were investigated. The performance of these devices towards a number of relevant exhaust gas components such as H-2, HC, CO, NO, was tested. Test gas concentrations were chosen to simulate exhaust gas emissions from lean-burn 4-stroke petrol engines. We found that GaN-based devices with platinum electrodes are mainly sensitive to hydrogen and unsaturated hydrocarbons with a sizeable cross-sensitivity to CO and NO2. These performance characteristics are similar to those of comparable SiC devices. With GaN devices this performance, however, can be obtained at a reduced complexity of the device processing and a greater freedom in the choice of sensor architectures. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:207 / 214
页数:8
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