Modulation periods and ratios induced changes of microstructure and mechanical properties of AlN/ZrB2 multilayered coatings

被引：28
|
作者：
Li, D. J. [1 ]
Wang, H. [1 ]
Kang, Y. B. [1 ]
Dong, L. [1 ]
Liu, G. Q. [1 ]
Gong, J. [1 ]
Sun, Y. D. [1 ]
Deng, X. Y. [1 ]
机构：
[1] Tianjin Normal Univ, Coll Phys & Elect Informat Sci, Tianjin 300387, Peoples R China
来源：
VACUUM | 2009年 / 83卷 / 12期
基金：
中国国家自然科学基金;
关键词：
Magnetron sputtering; AlN/ZrB2 multilayered coatings; Modulation period; Modulation ratio; WEAR; STABILITY;
D O I：
10.1016/j.vacuum.2009.05.002
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
AlN/ZrB2 multilayered coatings were synthesized in a magnetron sputtering system. The extensive measurements were employed to investigate the influence of different nanoscale modulation periods and modulation ratios on microstructure and mechanical properties of the coatings. Analysis of X-ray diffraction, profiler and nanoindention indicated that multilayered coatings possessed much higher hardness and elastic modulus than monolithic AlN and ZrB2 coatings. At the substrate negative bias of -80 V, maximum hardness (34.1 GPa) and elastic modulus (469.8 GPa) were obtained in the multilayer with Lambda = 30 nm and t(AlN):t(ZrB2) = 1:3. This hardest multilayer showed a marked polycrystalline structure with the strong mixture of ZrB2 (001), ZrB2 (100), ZrB2 (101), AlN (100) textures. (C) 2009 Elsevier Ltd. All rights reserved.
引用
收藏
页码：1411 / 1413
页数：3
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