Microwave dielectric spectroscopy of ferroelectric thin films

We devised a measurement method of microwave dielectric constants of dielectric thin films without applying electrodes. The method uses a rectangular waveguide in which the dielectric thin films prepared on a substrate are filled vertically at the center. The frequency dependence of S-parameter measured by network analyzer enables us to calculate the dielectric constant and loss factor of the films at the microwave region through simulation. We prepared Ba0.6Sr0.4TiO3 thin films on (001) MgO single crystal substrate by pulsed laser deposition (PLD), and determined their dielectric constant and loss factor at similar to10GHz using this method.