Fabrication of 3D Templates Using a Large Depth of Focus Femtosecond Laser

被引：2
|
作者：
Li Xiao-Fan [2 ,3 ]
Winfield Richard [1 ]
O'Brien Shane [1 ]
Chen Liang-Yao [2 ]
机构：
[1] Tyndall Natl Inst, Cork, Ireland
[2] Fudan Univ, Dept Opt Sci & Engn, Shanghai 200433, Peoples R China
[3] Natl Univ Ireland Univ Coll Cork, Dept Microelect Engn, Cork, Ireland
来源：
CHINESE PHYSICS LETTERS | 2009年 / 26卷 / 09期
关键词：
MICROFABRICATION;
D O I：
10.1088/0256-307X/26/9/094203
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
We report the use of a large depth of focus Bessel beam in the fabrication of cell structures. Two axicon lenses are investigated in the formation of high aspect ratio line structures. A sol-gel resin, with good mechanical strength, is polymerised in a modified two-photon polymerisation system. Examples of different two-dimensional grids are presented to show that the lateral resolution can be maintained even in the rapid fabrication of high-sided structures.
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页数：3
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