X-ray photoemission and low-energy electron microscope

被引：0
|
作者：
Vasina, R [1 ]
Mynár, M [1 ]
Kolarík, V [1 ]
机构：
[1] Delong Instruments, CZ-61200 Brno, Czech Republic
来源：
NANOSCALE SPECTROSCOPY AND ITS APPLICATIONS TO SEMICONDUCTOR RESEARCH | 2002年 / 588卷
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A small state-of-the-art X-ray photoemission arid and low energy microscope with electron mirror corrector has been developed. The paper describes requirements, design aspects arid status of the microscope.
引用
收藏
页码：172 / 179
页数：8
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