Semiconductor nanostructures for quantum wire lasers

被引：0
|
作者：
Piester, D [1 ]
Ivanov, AA [1 ]
Bakin, AS [1 ]
Wehmann, HH [1 ]
Schlachetzki, A [1 ]
机构：
[1] Tech Univ Carolo Wilhelmina, Inst Halbleitertech, D-38023 Braunschweig, Germany
来源：
ICONO 2001: FUNDAMENTAL ASPECTS OF LASER-MATTER INTERACTION AND PHYSICS OF NANOSTRUCTURES | 2002年 / 4748卷
关键词：
nanostructures; quantum wires; quantum wells; semiconductor lasers; InGaAs; InP; V-groove; MOVPE; wet-chemical etching;
D O I：
10.1117/12.468991
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We report on the improvements of an InGaAs/InP quantum wire (QWR) laser leading to a new concept of a single QWR laser. Its index/gain guiding structure consists of a vertical waveguide in combination with a laterally patterned semi-insulating current blocking layer with an additional oxide layer, which is realized by a simple self-aligning sub-pm lithography step. A further improvement of the structure is possible by reducing the thickness of InP buffer layers, which were necessary due to. technological reasons. One InP buffer layer may be omitted completely by increasing the growth temperature from 600 degreesC to 640 degreesC. By employing metal-organic vapor-phase epitaxy we found a significant increase of In-content of the QWRs at the raised temperature.
引用
收藏
页码：476 / 485
页数：10
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