Properties of Barium Cerate Thin Films Formed Using E-Beam Deposition

被引：5

作者：

Covarrubias, Monica Susana Campos ^{[1
]}

Sriubas, Mantas ^{[1
]}

Bockute, Kristina ^{[1
]}

Winiarz, Piotr ^{[2
]}

Miruszewski, Tadeusz ^{[2
]}

Skubida, Wojciech ^{[2
]}

Jaworski, Daniel ^{[2
]}

Bartmanski, Michal ^{[3
]}

Szkodo, Marek ^{[3
]}

Gazda, Maria ^{[2
]}

Laukaitis, Giedrius ^{[1
]}

机构：

[1] Kaunas Univ Technol, Phys Dept, LT-51368 Kaunas, Lithuania

[2] Gdansk Univ Technol, Fac Appl Phys & Math & Adv Mat Ctr, Inst Nanotechnol & Mat Engn, PL-80233 Gdansk, Poland

[3] Gdansk Univ Technol, Fac Mech Engn, Dept Mat Engn & Bonding, PL-80233 Gdansk, Poland

来源：

CRYSTALS | 2020年 / 10卷 / 12期

关键词：

BaCeO3; thin films; e-beam physical vapor deposition; mechanical properties; strains; electrical properties; stability; MECHANICAL-PROPERTIES; EVOLUTION; GROWTH;

D O I：

10.3390/cryst10121152

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

This article focuses on the properties of the BaCeO3 thin films formed by electron-beam vapor deposition and investigates the formation of barium cerates on supports with different thermal expansion coefficients (Stainless Steel, Invar, Glass Sealing, and Inconel substrates) and the influence of the technological parameters on the properties of the formed thin films with an emphasis on the stability of the films. Morphology and phase composition and mechanical and electrical properties were investigated. It was found that the main factors influencing the phase composition and morphology of the films are the temperature of the support and the deposition rate. However, the mechanical properties of the films are mostly influenced by strains introduced to thin films by using different supports. Two interesting features of the electrical properties of the studied strained films were noticed: the film with the highest in-plane tensile strain showed the lowest activation energy of total conductivity, whereas the film with the lowest strain showed the highest value of total conductivity.

引用

页码：1 / 13

页数：13

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