Alternate monatomic layer sputter deposition of FCT (L10-type) ordered FePt and CoPt films

FePt and CoPt alloy films with FCT(001) structural phase were deposited by sputtering. The films were formed by periodically alternating monatomic layers deposition of Fe(Co) and Pt, on MgO(I 0 0) substrates, with and without a Pt buffer layer, at substrate temperatures (T-S) ranging from 200 to 500 degrees C. The X-ray diffraction patterns show the formation of the FCT crystalline structure in FePt films deposited at T-S >= 200 degrees C. Hysteresis measurements, using Vibrating Sample Magnetrometry, show that FePt and CoPt films with predominant FCT(001) phase are perpendicularly magnetized. The long range order parameter S = 0.58 demonstrates the good degree of chemical order in FePt film prepared at T-S = 400 degrees C. The Experimental results demonstrate that the alternate monatomic layer sputter deposition technique is very effective to grow Fe(Co)Pt ordered alloy at moderate T-S. (c) 2006 Elsevier B.V. All rights reserved.