FABRICATION PROCESS OF INTEGRATED MULTI-ANALYTE BIOCHIP SYSTEM FOR IMPLANTABLE APPLICATION

被引：6

作者：

Tsai, Y. -C. ^{[1
]}

Chiu, N. -F. ^{[2
]}

Liu, P. -C. ^{[2
]}

Ou, Y-C ^{[3
]}

Liao, H. -H. ^{[1
]}

Yang, Y-J. ^{[1
]}

Yang, L. -J. ^{[3
]}

Lei, U. ^{[4
]}

Chao, F. -S. ^{[2
]}

Lu, S. -S. ^{[5
]}

Lin, C. -W. ^{[2
]}

Chang, P. -Z ^{[4
]}

Shih, W. -P. ^{[1
]}

机构：

[1] Natl Taiwan Univ, Dept Mech Engn, Taipei 10764, Taiwan

[2] Natl Taiwan Univ, Inst Biomed Engn, Taipei, Taiwan

[3] Tamkang Univ, Dept Mech & Elect Mech Engn, Tamsui, Taiwan

[4] Natl Taiwan Univ, Inst Appl Mech, Taipei, Taiwan

[5] Natl Taiwan Univ, Dept Elect Engn, Taipei, Taiwan

来源：

IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009) | 2009年

关键词：

GLUCOSE; BIOSENSOR;

D O I：

10.1109/MEMSYS.2009.4805354

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the integration of the fabrication processes for an implantable multi-analyte biochip system. The implantable biochip system has a microfluidic channel in which an electrochemical biosensor and a dielectrophoresis (DEP) micropump are fabricated by surface micromachining. The enzyme-based biosensor consists of three electrodes and detects the glucose level instantaneously by utilizing glucose oxidase (GOD). The DEP force resulting from the four-phase voltage exchange of the interdigitated electrodes drives the blood flow in the microchannel. By utilizing the MEMS fabrication and the electric circuit design, a compact implantable biochip system is achieved.

引用

页码：204 / 207

页数：4

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