共 50 条
- [41] Optical efficiency of MEMS deformable mirror for adaptive optics [J]. MEMS ADAPTIVE OPTICS III, 2009, 7209
- [42] Optical switching - Deformable mirror boosts coupling efficiency [J]. LASER FOCUS WORLD, 2002, 38 (05): : 53 - 54
- [44] Integrated deformable mirror on silicon for optical data storage [J]. MOEMS Display and Imaging Systems III, 2005, 5721 : 159 - 169
- [45] NEAREST NEIGHBOR HYBRID DEFORMABLE MIRROR OPTICAL COMPUTER [J]. PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1983, 431 : 215 - 220
- [46] A micromachined optical switch with a vertical SU-8 mirror [J]. MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY AND DEVICES, 2001, 4601 : 354 - 359
- [47] Surface micromachined MEMS deformable mirror based on hexagonal parallel-plate electrostatic actuator [J]. 19TH ANNUAL CONFERENCE AND 8TH INTERNATIONAL CONFERENCE OF CHINESE SOCIETY OF MICRO/NANO TECHNOLOGY (CSMNT2017), 2018, 986
- [48] Miniature optical scanning range sensor utilizing a silicon micromachined scanner [J]. TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 1997, : 1275 - 1278
- [49] Miniature variable optical delay using silicon micromachined scanning mirrors [J]. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 2000, : 383 - 384
- [50] Wavefront control algorithm research on micromachined membrane deformable mirror in the human eye aberration correction [J]. Guangxue Xuebao/Acta Optica Sinica, 2010, 30 (04): : 917 - 921