Non-overlap subaperture interferometric testing for large optics

被引：1
|
作者：
Wu, Xin [1 ,2 ]
Yu, Yingjie [1 ]
Zeng, Wenhan [2 ]
Qi, Te [1 ]
Chen, Mingyi [1 ]
Jiang, Xiangqian [2 ]
机构：
[1] Shanghai Univ, Dept Precis Mech Engn, Shanghai 200072, Peoples R China
[2] Univ Huddersfield, Sch Comp & Engn, Ctr Precis Technol, Huddersfield 3DH, W Yorkshire, England
来源：
OPTICS COMMUNICATIONS | 2017年 / 396卷
基金：
英国工程与自然科学研究理事会; 中国国家自然科学基金;
关键词：
Surface reconstruction; Non-overlap subaperture stitching; Subaperture distribution pattern; Polynomial fitting; Square Zernike polynomial; STITCHING INTERFEROMETER; LARGE FLAT; SURFACE; RECONSTRUCTION;
D O I：
10.1016/j.optcom.2017.03.047
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
It has been shown that the number of subapertures and the amount of overlap has a significant influence on the stitching accuracy. In this paper, a non-overlap subaperture interferometric testing method (NOSAI) is proposed to inspect large optical components. This method would greatly reduce the number of subapertures and the influence of environmental interference while maintaining the accuracy of reconstruction. A general subaperture distribution pattern of NOSAI is also proposed for the large rectangle surface. The square Zernike polynomial is employed to fit such wavefront. The effect of the minimum fitting terms on the accuracy of NOSAI and the sensitivities of NOSAI to subaperture's alignment error, power systematic error, and random noise are discussed. Experimental results validate the feasibility and accuracy of the proposed NOSAI in comparison with wavefront obtained by a large aperture interferometer and stitching surface by multi-aperture overlap-scanning technique (MAOST).
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页码：191 / 198
页数：8
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