Colored Timed Petri-Nets modeling and dynamic scheduling using GA of semiconductor manufacturing

被引：0
|
作者：
Woo, KB [1 ]
Kang, SJ [1 ]
Jang, SH [1 ]
Hwang, HS [1 ]
机构：
[1] Yonsei Univ, Sch Elect & Mech Engn, Seoul 120749, South Korea
来源：
ICEMI'99: FOURTH INTERNATIONAL CONFERENCE ON ELECTRONIC MEASUREMENT & INSTRUMENTS, VOLS 1 AND 2, CONFERENCE PROCEEDINGS | 1999年
关键词：
colored timed petri-nets; genetic algorithm; heuristic job scheduling; semiconductor manufacturing system;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, an effective method of system modeling and dynamic scheduling to improve operation and control for the Back-End process of semiconductor manufacturing is developed by using Colored Timed Petri-Nets (CTPNs). The simulator of a CTPNs model was utilized to generate a new heuristic scheduling method with genetic algorithm(GA) which enables us to obtain the optimal values of the weighted delay time and standard deviation of lead time.
引用
收藏
页码：52 / 59
页数：8
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