Process adapts FIB milling to copper metallization

被引：0
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作者：
Strassberg, D
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EDN | 2000年 / 45卷 / 15期
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码：26 / 26
页数：1
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