Fabrication of patterned organic thin film by low-energy electron beam lithography and surface-initiated ring-opening metathesis polymerization

被引：2
|
作者：
Ding, Zhebo [1 ]
Ganem, Bruce [1 ]
机构：
[1] Cornell Univ, Dept Chem & Biol Chem, Baker Lab, Ithaca, NY 14853 USA
来源：
CANADIAN JOURNAL OF CHEMISTRY | 2006年 / 84卷 / 10期
关键词：
patterned thin film; e-beam lithography; ring-opening metathesis polymerization; polymer brushes;
D O I：
10.1139/V06-089
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
High densities of immobilized polymer brushes have been created on solid supports in a spatially addressable fashion. Octadecyltrichlorosilane was self-assembled on a silicon substrate to form an inert monolayer. The substrate was then patterned by low-energy electron beam lithography. Finally, the exposed region was back-filled with a second functionalized silane and the pattern was further amplified by surface-initiated ring-opening metathesis polymerization. The patterned substrate was imaged by scanning electron microscopy and atomic force microscopy.
引用
收藏
页码：1254 / 1258
页数：5
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