A high performance optomechanical mass sensor

被引:0
|
作者
Zhang, Yeping [1 ]
Ai, Jie [1 ]
Xiang, Yanjun [1 ]
He, Qinghua [1 ]
Li, Tao [1 ]
机构
[1] China Acad Engn Phys, Inst FluidPhys, Mianyang 621999, Peoples R China
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D O I
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A mass sensor based on split-nanobeam optomechanical crystal cavity with effective motion mass below 10fg and mechanical frequency exceed 10GHz is proposed. Based on our simulation, exceed 10MHz/fg detection sensitivity can be realized.
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页数:2
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