Fabrication and characterization of suspended microstructures of ultrananocrystalline diamond

被引：0
|
作者：
Pachiu, C. [1 ]
Sandu, T. [1 ]
Tibeica, C. [1 ]
Avram, A. [1 ]
Veca, L. M. [1 ]
Popa, R. [1 ]
Popescu, M. [1 ]
Gavrila, R. [1 ]
Popov, C. [2 ]
Avramescu, V. [1 ]
机构：
[1] Natl Inst Res & Dev Microtechnol IMT Bucharest, 126A Erou Iancu Nicolae, Bucharest, Romania
[2] Univ Kassel, Inst Nanostruct Technol & Analyt, Heinrich Plett Str 40, D-34132 Kassel, Germany
来源：
ROMANIAN JOURNAL OF INFORMATION SCIENCE AND TECHNOLOGY | 2018年 / 21卷 / 01期
关键词：
residual stress; ultrananocrystalline diamond; MEMS; suspended microstructures; THIN-FILMS; MEMS; SCIENCE; CVD;
D O I：
暂无
中图分类号：
TP301 [理论、方法];
学科分类号：
081202 ;
摘要：
The fabrication of various suspended microstructures made from ultrananocrystalline diamond was performed without sacrificial layer. Arrays of bridges and cantilevers of various dimensions were successfully fabricated by a well-controlled process. Mechanical characterizations and finite element calculations allowed us to estimate both the Young's modulus as well as the residual stress built in the ultrananocrystalline diamond film.
引用
收藏
页码：49 / 60
页数：12
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