Micromachining of ultrananocrystalline diamond

被引：12

作者：

Moldovan, N ^{[1
]}

Auciello, O ^{[1
]}

Sumant, AV ^{[1
]}

Carlisle, JA ^{[1
]}

Divan, R ^{[1
]}

Gruen, DM ^{[1
]}

Krauss, AR ^{[1
]}

Mancini, DC ^{[1
]}

Jayatissa, A ^{[1
]}

Tucek, J ^{[1
]}

机构：

[1] Argonne Natl Lab, Expt Facil Div, Argonne, IL 60439 USA

来源：

MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY VII | 2001年 / 4557卷

关键词：

D O I：

10.1117/12.442958

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Ultrananocrystalline diamond (UNCD) with grain sizes in the range of 2-5 run is produced using a microwave plasma chemical vapor deposition process with argon-rich C-60 or CH4 plasmas. This material has excellent mechanical properties: high hardness and Young modulus, and an extremely low friction coefficient (similar to0.01). It is resistant to chemical attack, and is potentially biocompatible. These properties make UNCD a very good candidate for a diamond-based microelectromechanical systems (MEMS) technology. We report on the micromachinability of this material by selective seeding, selective growth and reactive ion etching, in conjunction with SiO2 sacrificial layers for fabricating 3-D structures with freestanding or movable parts. These micromachining techniques are used to develop a totally UNCD-made turbine as a demonstration for UNCD-based MEMS.

引用

页码：288 / 298

页数：11

共 50 条

[1] Etch selectivities of mask materials for micromachining of ultrananocrystalline diamond film
Choi, Byoung Su
Park, Jong Cheon
Hwang, Sungu
Kim, Jin Kon
Shin, Sung Chul
Lee, In Won
Ryu, Jeong Ho
Cho, Hyun
[J]. JOURNAL OF CERAMIC PROCESSING RESEARCH, 2016, 17 (11): : 1123 - 1126
[2] Ultrananocrystalline Diamond Films
Woehrl, Nicolas
Buck, Volker
[J]. VAKUUM IN FORSCHUNG UND PRAXIS, 2011, 23 (01) : 24 - 28
[3] Thermomechanical stability of ultrananocrystalline diamond
Adiga, Vivekananda P.
Suresh, Sampath
Datta, Arindom
Carlisle, John A.
Carpick, Robert W.
[J]. JOURNAL OF APPLIED PHYSICS, 2012, 111 (05)
[4] Ultrananocrystalline diamond in the laboratory and the cosmos
Gruen, DM
[J]. MRS BULLETIN, 2001, 26 (10) : 771 - 776
[5] Nanopatterning of ultrananocrystalline diamond nanowires
Wang, Xinpeng
Ocola, Leonidas E.
Divan, Ralu S.
Sumant, Anirudha V.
[J]. NANOTECHNOLOGY, 2012, 23 (07)
[6] Nanoporous ultrananocrystalline diamond membranes
Makarova, Olga
Divan, Ralu
Moldovan, Nicolaie
Rosenmann, Daniel
Tang, Cha-Mei
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2010, 28 (06): : C6P42 - C6P47
[7] Application of ultrananocrystalline diamond coatings
Canter, N
[J]. TRIBOLOGY & LUBRICATION TECHNOLOGY, 2006, 62 (05) : 10 - 12
[8] Electrical contacts to ultrananocrystalline diamond
Gerbi, JE
Auciello, O
Birrell, J
Gruen, DM
Alphenaar, BW
Carlisle, JA
[J]. APPLIED PHYSICS LETTERS, 2003, 83 (10) : 2001 - 2003
[9] Grating Couplers in Ultrananocrystalline Diamond
Verbist, Marie
Van Thourhout, Dries
[J]. 2011 IEEE PHOTONICS CONFERENCE (PHO), 2011, : 11 - 12
[10] Fracture paths and ultrananocrystalline diamond
Paci, JT
Sun, LP
Belytschko, T
Schatz, GC
[J]. CHEMICAL PHYSICS LETTERS, 2005, 403 (1-3) : 16 - 21

← 1 2 3 4 5 →