A Wireless Passive Pressure and Temperature Sensor via a Dual LC Resonant Circuit in Harsh Environments

被引：66
|
作者：
Tan, Qiulin [1 ]
Luo, Tao [1 ,2 ]
Wei, Tanyong [2 ]
Liu, Jun
Lin, Liwei [3 ]
Xiong, Jijun [1 ]
机构：
[1] North Univ China, Minist Educ, Key Lab Instrumentat Sci & Dynam Measurement, Taiyuan 030051, Peoples R China
[2] City Univ Hong Kong, Dept Mech & Biomed Engn, Hong Kong, Hong Kong, Peoples R China
[3] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA
来源：
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2017年 / 26卷 / 02期
基金：
中国国家自然科学基金;
关键词：
Harsh environments; passive wireless sensor; LTCC; dual LC resonant circuit;
D O I：
10.1109/JMEMS.2016.2642580
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents a passive wireless sensor for simultaneously and remotely measuring pressure and temperature under harsh environments. The sensor consists of a dual LC (inductor and capacitor) resonant circuit, one without a cavity and the other with a cavity capacitor for temperature and pressure sensing, respectively. The low-temperature co-fired ceramic technology is used to fabricate the sensor, making it suitable for high-temperature harsh environment operations. Experimental results show the prototype sensor has temperature sensitivity of 8.15 kHz/degrees C and pressure sensitivity of 1.96 MHz/Bar up to 400 degrees C.
引用
收藏
页码：351 / 356
页数：6
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