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GaN-Based Light-Emitting Diode Prepared on Nano-Inverted Pyramid GaN Template
被引:3
|作者:
Kuo, C. W.
[1
]
Chang, L. C.
[1
]
Kuo, Cheng-Huang
[1
]
机构:
[1] Natl Cent Univ, Dept Opt & Photon, Tao Yuan 32001, Taiwan
关键词:
InGaN-GaN;
light-emitting diode (LED);
nano;
template;
INGAN-GAN;
LEDS;
LAYERS;
LITHOGRAPHY;
IMPROVEMENT;
BRIGHTNESS;
EFFICIENCY;
BLUE;
D O I:
10.1109/LPT.2009.2031247
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
Using self-aligned SiO nano-spheres as an etching mask, the authors demonstrated the formation of a GaN-based nano-inverted pyramid (NIP) structure. It was found that crystal quality of the GaN epilayer prepared on an NIP/GaN template was significantly better than that prepared with conventional low-temperature GaN nucleation layer. With the NIP structure, it was found that 20-mA light-emitting-diode (LED) output power can be enhanced by 32%, as compared with the conventional LED.
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页码:1645 / 1647
页数:3
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