GaN-Based Light-Emitting Diode Prepared on Nano-Inverted Pyramid GaN Template

被引:3
|
作者
Kuo, C. W. [1 ]
Chang, L. C. [1 ]
Kuo, Cheng-Huang [1 ]
机构
[1] Natl Cent Univ, Dept Opt & Photon, Tao Yuan 32001, Taiwan
关键词
InGaN-GaN; light-emitting diode (LED); nano; template; INGAN-GAN; LEDS; LAYERS; LITHOGRAPHY; IMPROVEMENT; BRIGHTNESS; EFFICIENCY; BLUE;
D O I
10.1109/LPT.2009.2031247
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Using self-aligned SiO nano-spheres as an etching mask, the authors demonstrated the formation of a GaN-based nano-inverted pyramid (NIP) structure. It was found that crystal quality of the GaN epilayer prepared on an NIP/GaN template was significantly better than that prepared with conventional low-temperature GaN nucleation layer. With the NIP structure, it was found that 20-mA light-emitting-diode (LED) output power can be enhanced by 32%, as compared with the conventional LED.
引用
收藏
页码:1645 / 1647
页数:3
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