Evaluation of thermoelastic damping in micromechanical resonators with axial pretension: An analytical model accounting for two-dimensional thermal conduction

被引:15
|
作者
Chen, Siyu [1 ,2 ]
Song, Jie [3 ]
Guo, Fenglin [1 ,2 ]
机构
[1] Shanghai Jiao Tong Univ, Sch Naval Architecture Ocean & Civil Engn, State Key Lab Ocean Engn, Shanghai 200240, Peoples R China
[2] Shanghai Jiao Tong Univ, Collaborat Innovat Ctr Adv Ship & Deep Sea Explor, Shanghai, Peoples R China
[3] Singapore Inst Mfg Technol, Joining Technol Grp, Singapore 637662, Singapore
基金
中国国家自然科学基金;
关键词
Axial pretension; finite element analysis; micromechanical resonator; thermoelastic damping; DISSIPATION;
D O I
10.1080/01495739.2019.1623141
中图分类号
O414.1 [热力学];
学科分类号
摘要
It has been reported that application of tensile axial stress can simultaneously increase quality factor and resonant frequency for micromechanical resonators. In this study, we formulate an analytical model for evaluating thermoelastic damping in micromechanical resonators based on the thermal energy method, in which thermal conductions in both thickness direction and axial direction are considered. An explicit expression for thermoelastic damping in the form of infinite series has been obtained. The proposed analytical model is further validated by finite element analysis. Results of the present study demonstrate that the 2D model needs to be adopted in order to accurately evaluate thermoelastic damping of micromechanical resonators with axial pretension. In addition, the 2D model proposed in the present study eliminates the inherent inconsistency entailed in the 1D model.
引用
收藏
页码:1192 / 1205
页数:14
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