Structure and photoluminescence properties of evaporated GeOx/SiO2 multilayers

被引：30
|
作者：
Ardyanian, M. [1 ]
Rinnert, H. [1 ]
Vergnat, M. [1 ]
机构：
[1] Nancy Univ, CNRS, UMR 7556, Phys Mat Lab, F-54506 Vandoeuvre Les Nancy, France
来源：
JOURNAL OF APPLIED PHYSICS | 2006年 / 100卷 / 11期
关键词：
D O I：
10.1063/1.2400090
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Amorphous GeOx/SiO2 multilayers were prepared by successive evaporations of GeO2 and SiO2 powders onto substrates maintained at 100 degrees C. The evolution of the structure was investigated by x-ray reflectometry, transmission electron microscopy, infrared-absorption spectrometry and Raman spectrometry for annealing temperatures less than 800 degrees C. These experiments allowed us to follow the phase decomposition of the GeOx alloy and to observe the appearance of amorphous and crystallized germanium aggregates. The evolution of the photoluminescence in the range of 0.8-2.2 eV was correlated to the structure of the films. (c) 2006 American Institute of Physics.
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