Micro Tensile Tests on Aluminium Thin Films: Tensile Device and In-Situ Observations

被引：0

作者：

Ignat, M. ^{[1
]}

Lay, S. ^{[1
]}

Roussel-Dherbey, F. ^{[1
]}

Seguineau, C. ^{[3
]}

Malhaire, C. ^{[2
]}

Lafontan, Xavier ^{[3
]}

Desmarres, J. M. ^{[4
]}

Brida, S. ^{[5
]}

机构：

[1] Univ Joseph Fourier, ENSEEG INPG, SIMAP UMR 5266, F-38402 St Martin Dheres, France

[2] Univ Lyon, CNRS UMR 5270, INSA Lyon, INL, F-69621 Villeurbanne, France

[3] Nova MEMS, F-31520 Ramonville St Agne, France

[4] CNES, DCT AQ LE, F-31401 Toulouse, France

[5] AUXITROL SA, Esterline Sensors Grp, F-18941 Bourges, France

来源：

MICROELECTROMECHANCIAL SYSTEMS - MATERIALS AND DEVICES II | 2009年 / 1139卷

关键词：

MECHANICAL-BEHAVIOR;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The results of micromechanical tensile experiments performed on thin aluminum samples are presented and discussed. The micro tensile test system and the design of the samples, based on finite element modeling (FEM), and their production by micromachining are briefly described. Some examples of the stress strain curves are presented. The Young's modulus and critical parameters (flow and rupture stress and strains) are reported. The micro structural changes induced by the tensile experiment were observed during and after the testing by scanning electron microscopy (SEM) and transmission electron microscopy (TEM).

引用

页码：217 / +

页数：2

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