Oxidation smoothening of silicon machined micro- and nano-scale structures

被引：5
|
作者：
Azimi, S. [1 ,2 ]
Dang, Z. Y. [1 ]
Breese, M. B. H. [1 ,2 ]
机构：
[1] Natl Univ Singapore, Dept Phys, Ctr Ion Beam Applicat, Singapore 117542, Singapore
[2] Natl Univ Singapore, Singapore Synchrotron Light Source, Singapore 117603, Singapore
来源：
MICROELECTRONIC ENGINEERING | 2014年 / 121卷
基金：
新加坡国家研究基金会;
关键词：
Silicon micromachining; Surface roughness; Ion beam irradiation; Electrochemical anodization; Two- and three-dimensional structures; Free-standing; SURFACE-ROUGHNESS; FABRICATION;
D O I：
10.1016/j.mee.2014.04.033
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We have developed a process to machine bulk silicon in two- and three-dimensions shapes and structures. Here we briefly introduce this process and give examples of the types of surface profiles and three-dimensional geometries which can be fabricated. One of the limitations, as with all forms of silicon machining is the final surface roughness, as this introduces losses, for example in light propagation through photonic devices. Here we describe various contributing factors to the surface roughness and options to reducing it. Under optimized conditions roughness values of less than 1 nm can be achieved. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码：156 / 161
页数：6
相关论文
共 50 条
  • [21] Formation and dynamic manipulation of an assembly of micro- and nano-scale particles
    Daria, VR
    Rodrigo, PJ
    Eriksen, RL
    Glückstad, J
    BIOMEDICAL APPLICATIONS OF MICRO- AND NANOENGINEERING, 2002, 4937 : 41 - 48
  • [22] Special Issue on Micro- and Nano-Scale Radiative Transfer Preface
    Zhang, Zhuomin
    Maruyama, Shigenao
    Sakurai, Atsushi
    Menguc, M. Pinar
    JOURNAL OF QUANTITATIVE SPECTROSCOPY & RADIATIVE TRANSFER, 2014, 132 : 1 - 2
  • [23] Laser direct writing of micro- and nano-scale medical devices
    Gittard, Shaun D.
    Narayan, Roger
    EXPERT REVIEW OF MEDICAL DEVICES, 2010, 7 (03) : 343 - 356
  • [24] Micro- and Nano-scale Tribo-Corrosion of Cast CoCrMo
    D. Sun
    J. A. Wharton
    R. J. K. Wood
    Tribology Letters, 2011, 41 : 525 - 533
  • [25] Micro-/Nano-Scale Biointerfaces, Mechanical Coupling and Cancer Therapy
    Li, Xiang
    Liu, Cuiying
    Chen, Peipei
    Han, Dong
    CURRENT TOPICS IN MEDICINAL CHEMISTRY, 2017, 17 (16) : 1872 - 1886
  • [26] Thermal Energy Loss Mechanisms in Micro- to Nano-scale Devices
    Duwel, A. E.
    Lozow, Jeff
    Fisher, Christopher J.
    Phillips, Terese
    Olsson, Roy H.
    Weinberg, Marc
    MICRO- AND NANOTECHNOLOGY SENSORS, SYSTEMS, AND APPLICATIONS III, 2011, 8031
  • [27] Applications of Nonlinear Dynamics and Chaos in Micro- and Nano-Scale Systems
    Lai, Ying-Cheng
    INTERNATIONAL CONFERENCE ON APPLICATIONS IN NONLINEAR DYNAMICS (ICAND 2010), 2010, 1339 : 88 - 96
  • [28] EXPERIMENTAL MEASUREMENTS OF MECHANICAL RESPONSE IN MICRO- AND NANO-SCALE MATERIALS
    Hemker, K. J.
    NANOSTRUCTURED METALS: FUNDAMENTALS TO APPLICATIONS, 2009, : 45 - 57
  • [29] Femtoprint: A femtosecond laser printer for micro- and nano-scale systems
    Bellouard, Y.
    Champion, A.
    Gevincevicius, M.
    Corbari, C.
    Beresna, M.
    Kazansky, P.
    Chappuis, O.
    Kral, M.
    Clavel, R.
    Breguet, J. -M.
    Barrot, F.
    Mabillard, Y.
    Bottinelli, S.
    Hopper, M.
    Hoenninger, C.
    Mottay, E.
    Lopez, J.
    2012 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2012,
  • [30] Micro- and Nano-scale Tribo-Corrosion of Cast CoCrMo
    Sun, D.
    Wharton, J. A.
    Wood, R. J. K.
    TRIBOLOGY LETTERS, 2011, 41 (03) : 525 - 533
12345