Amplification in light-induced reaction of Cu with Cl2 in the VUV

被引:4
|
作者
Raaf, H [1 ]
Groen, M [1 ]
Schwentner, N [1 ]
机构
[1] Free Univ Berlin, Inst Phys Expt, D-14195 Berlin, Germany
关键词
dry etching; microstructuring; photolithography; synchrotron radiation; Cu; Cl-2;
D O I
10.1016/S0169-4332(99)00479-1
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A non-selective light-induced reaction was observed in the spectral range from 135 to 120 nm due to electronic excitation of Cl-2 in the gas phase to the (1)Sigma(u)(+) and 2(1)Sigma(u)(+) states. It reaches a quantum efficiency of reacted Cu per impinging photon of 174 and the underlying amplification process has an efficiency of 4 x 10(6). A selective reaction dominates between 135 and 200 nm with two prominent bands at 170 and 144 nm. It originates from a bulk-excitation with a quantum efficiency of two reacted atoms per photon. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:536 / 541
页数:6
相关论文
共 50 条
  • [41] VUV/UV/Cl2工艺去除饮用水中的乐果
    吴铮笛
    陈芳艳
    唐玉斌
    王新刚
    李梦凯
    强志民
    环境工程学报, 2020, 14 (02) : 305 - 311
  • [42] LIGHT-INDUCED REACTION ON CHALCONE WITH DIBROMOYLID - PHOTOCHEMICAL CHALCONE REACTION
    PORWAL, M
    MEHTA, BK
    JAIN, S
    NATIONAL ACADEMY SCIENCE LETTERS-INDIA, 1985, 8 (12): : 381 - 382
  • [43] Reaction mechanism of low-temperature Cu dry etching using an inductively coupled Cl2/N2 plasma with ultraviolet light irradiation
    Kwon, MS
    Lee, JY
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1999, 146 (08) : 3119 - 3123
  • [44] THERMAL AND LIGHT-INDUCED MOBILITY OF CL2- ANION-RADICALS IN GLASS
    VOROBEV, AK
    POLENOK, AV
    GURMAN, VS
    KHIMICHESKAYA FIZIKA, 1990, 9 (06): : 840 - 845
  • [45] Rate constant for the reaction of Cl2(aq) with OH-
    Gershenzon, M
    Davidovits, P
    Jayne, JT
    Kolb, CE
    Worsnop, DR
    JOURNAL OF PHYSICAL CHEMISTRY A, 2002, 106 (34): : 7748 - 7754
  • [46] Conversion of HCl to Cl2 by coupling oxidation reaction and dewatering
    Chen, Xian
    Qiao, Xu
    Wang, Yong
    Tang, Ji-Hai
    Cui, Mi-Fen
    Guocheng Gongcheng Xuebao/The Chinese Journal of Process Engineering, 2007, 7 (05): : 939 - 943
  • [47] EXCHANGE REACTION BETWEEN CL2 AND CCL4
    JOHNSTON, FJ
    WILLARD, JE
    JOURNAL OF PHYSICAL CHEMISTRY, 1961, 65 (02): : 317 - &
  • [48] RATE AND MECHANISM OF THE NH(A(1)DELTA)+CL2 REACTION
    SINGLETON, SM
    COOMBE, RD
    CHEMICAL PHYSICS LETTERS, 1993, 215 (1-3) : 237 - 242
  • [49] COMPETITIVE REACTION RATES OF HYDROGEN ATOMS WITH HCL AND CL2
    WILKINS, RL
    JOURNAL OF CHEMICAL PHYSICS, 1965, 42 (02): : 806 - &
  • [50] Probing the reaction kinetics of chlorine radicals (Cl•/Cl2•- ) with N-nitrosamines
    Lei, Xin
    Lei, Yu
    Cheng, Shuangshuang
    Yang, Xin
    JOURNAL OF ENVIRONMENTAL CHEMICAL ENGINEERING, 2022, 10 (06):