Synthesis and characterization of titania and vanadia thin films at organic self-assembled monolayers

被引:12
|
作者
Niesen, TP [1 ]
Wolff, J [1 ]
Bill, J [1 ]
De Guire, MR [1 ]
Aldinger, F [1 ]
机构
[1] Max Planck Inst Met Res, D-70569 Stuttgart, Germany
来源
关键词
D O I
10.1557/PROC-576-197
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Functionalized self-assembled monolayers (SAMs) on single-crystal Si wafers have been used as substrates for the deposition of titania and vanadia thin films. The formation of a titanium chelate was used to stabilize an otherwise spontaneously precipitating aqueous titanium solution. Uniform titania films have been synthesized from Ti(O-2)(2+) in aqueous HCl solutions at 80 degrees C on sulfonated SAMs. Vanadium oxide hydrate films, V2O5.0.7 H2O, have been directly formed from aqueous vanadate solutions on NH2-terminated SAMs at 45 degrees C. In the as-deposited films, water molecules were intercalated between the vanadium oxide layers. Subsequent annealing at 350 degrees C in air led to nanocrystalline V2O5.
引用
收藏
页码:197 / 202
页数:6
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