Miniaturized optical fiber Fabry-Perot interferometer fabricated by femtosecond laser irradiation and selective chemical etching

被引：0
|
作者：
Yuan, Lei [1 ,2 ]
Lan, Xinwei [2 ]
Huang, Jie [2 ]
Wang, Hanzheng [2 ]
Cheng, Baokai [2 ]
Liu, Jie [2 ]
Xiao, Hai [2 ]
机构：
[1] Beijing Inst Technol, Sch Mech Engn, Laser Micro Nano Fabricat Lab, Beijing 100081, Peoples R China
[2] Clemson Univ, Dept Elect & Comp Engn, Clemson, SC 29634 USA
来源：
ADVANCED FABRICATION TECHNOLOGIES FOR MICRO/NANO OPTICS AND PHOTONICS VII | 2014年 / 8974卷
关键词：
Fabry-Perot Interferometer; fs laser irradiation; selective chemical etching; temperature sensing; SENSOR; FILM;
D O I：
10.1117/12.2038824
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A U-shaped optical fiber inline microchannel was fabricated by femtosecond laser irradiation and subsequent selective chemical wet etching. A high quality micro-cavity embedded inside the channel was obtained to construct a Fabry-Perot interferometer (FPI). A fringe visibility of 20 dB in spectrum domain was achieved. High temperature survivability of this micro device was also demonstrated. The proposed assembly-free optical fiber inline interferometer is attractive for sensing applications in high-temperature harsh environments.
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页数：7
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