[1] I Shou Univ, Dept Mat Sci & Engn, Kaohsiung 840, Taiwan
[2] Natl Yunlin Univ Sci & Technol, Bachelor Program Interdisciplinary Studies, 123 Univ Rd,Sect 3, Touliu 64002, Yunlin, Taiwan
[3] Dayeh Univ, Bachelor Program Design & Mat Med Equipment & Dev, Changhua 51591, Taiwan
[4] Natl Yunlin Univ Sci & Technol, Grad Sch Mat Sci, 123 Univ Rd,Sect 3, Touliu 64002, Yunlin, Taiwan
[5] Taiwan Semicond Res Inst, Natl Appl Res Labs, Hsinchu 30078, Taiwan
[6] Natl Cheng Kung Univ, Instrument Ctr, Tainan 70140, Taiwan