Three-dimensional STEM with nm-scale spatial resolution

被引：0
|
作者：
Tanaka, N [1 ]
Murooka, Y
Koguchi, M
Kakibayashi, H
Tsuneta, R
Kase, K
Iwaki, M
机构：
[1] Nagoya Univ, Dept Appl Phys, Nagoya, Aichi 4648603, Japan
[2] Hitachi Ltd, Cent Res Lab, Kokubunji, Tokyo 1858604, Japan
[3] Inst Phys & Chem Res, Wako, Saitama 3510198, Japan
来源：
ELECTRON MICROSCOPY AND ANALYSIS 2001 | 2001年 / 168期
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A new STEM instrument has been developed for three-dimensional (3D) electron microscopy for nano-structures. For accurate eucentric rotation, a new specimen stage with double spherical fulcra was developed. Cylindrical specimens for 3D observation were prepared by the micro-sampling technique using a focused ion beam. Copper damascene of a semiconductor memory device and ZnO particles were observed by the 3D STEM from various directions, and the 3D images were well reconstructed in topography/tomography modes.
引用
收藏
页码：159 / 162
页数：4
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