Angular distributions of particles sputtered from polycrystalline platinum by low-energy ions

被引：5

作者：

Chernysh, VS

Eckstein, W

Haidarov, AA

Kulikauskas, VS

Mashkova, ES ^{[1
]}

Molchanov, VA

机构：

[1] Moscow MV Lomonosov State Univ, Inst Nucl Phys, Moscow 119899, Russia

[2] Moscow MV Lomonosov State Univ, Fac Phys, Moscow 119899, Russia

[3] Max Planck Inst Plasma Phys, D-85748 Garching, Germany

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2000年 / 164卷

关键词：

ion bombardment; sputtered flux; angular distributions;

D O I：

10.1016/S0168-583X(99)01171-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The results of an experimental study and a computer simulation with the TRIM.SP code of the angular distributions of atoms sputtered from polycrystalline platinum under 3-9 keV Ne+ bombardment at normal ion incidence are presented. It was found that angular distributions of sputtered atoms are overcosine and that their shape is practically independent of an ion energy. Comparison with the previously obtained data for He+ and Ar+ ions have shown that the shape of the angular distribution does not depend on the bombarding ion species. Good agreement between experimental results and computer simulation data was found. Computer simulations of the partial angular distributions of Pt atoms ejected due to various sputtering mechanisms for Ne ion bombardment were performed and the comparison with corresponding data for He and Ar bombarding was made. The role of different mechanisms in the formation of angular distributions of sputtered atoms has been analyzed. (C) 2000 Published by Elsevier Science B.V. All rights reserved.

引用

页码：755 / 761

页数：7

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