Ultra-thin microporous-mesoporous metal oxide films prepared by molecular layer deposition (MLD)

被引：106
|
作者：
Liang, Xinhua [1 ]
Yu, Miao [1 ]
Li, Jianhua [1 ]
Jiang, Ying-Bing [2 ]
Weimer, Alan W. [1 ]
机构：
[1] Univ Colorado, Dept Chem & Biol Engn, Boulder, CO 80309 USA
[2] Univ New Mexico, Dept Chem & Nucl Engn, Albuquerque, NM 87131 USA
来源：
CHEMICAL COMMUNICATIONS | 2009年 / 46期
基金：
美国国家科学基金会;
关键词：
POLYMER-FILMS; MONOLAYER-PRECISION; SUPERLATTICES; FABRICATION; MEMBRANES; GROWTH;
D O I：
10.1039/b911888h
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Porous aluminium oxide films with precisely controlled thickness down to several angstroms are deposited on particle surfaces from dense aluminium alkoxide hybrid polymer films by molecular layer deposition. Porous structures are obtained by either mild water etching at room temperature or calcination in air at elevated temperatures.
引用
收藏
页码：7140 / 7142
页数：3
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