Application of Dielectric Elastomer Planar Actuators in a Micropump Chip

被引：0

作者：

Pang, Xuanming ^{[1
]}

Li, Bo ^{[1
]}

Xia, Dongmei ^{[1
]}

Jing, Sufang ^{[1
]}

机构：

[1] Xi An Jiao Tong Univ, Sch Mech Engn, Xian 710049, Peoples R China

来源：

ICIEA: 2009 4TH IEEE CONFERENCE ON INDUSTRIAL ELECTRONICS AND APPLICATIONS, VOLS 1-6 | 2009年

关键词：

Dielectric elastomer; Actuator; Micropump; SU-8;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

this paper presented a valveless micropump driven and sealed by dielectric elastomers (DEs). First, the planar DE actuator was designed and the diaphragm actuating performances were characterized. Then the micropump, containing a chamber and a pair of nozzle/diffuser, was fabricated on SU-8 under exposure to UV-light with a mask. The diaphragm and the SU-8 was sealed by adhesive tape and finally covered by a PMMA. The pumping and flow rate was tested and measure under high AC supply. Due to the undesirable durability, most micropumps were breakdown, and a maxim flow rate of 0.078ml/min was achieved under 4000V, 0.5Hz sine wave. The micropump is attractive but needs further investigation before any successful application.

引用

页码：1190 / 1193

页数：4

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