Near-field scanning optical tomography: A nondestructive method for three-dimensional nanoscale imaging

被引:8
|
作者
Sun, Jin
Carney, P. Scott
Schotland, John C.
机构
[1] Univ Illinois, Dept Elect & Comp Engn, Urbana, IL 61801 USA
[2] Univ Illinois, Beckman Inst Adv Sci & Technol, Urbana, IL 61801 USA
[3] Univ Penn, Dept Bioengn, Philadelphia, PA 19104 USA
[4] Univ Illinois, Coordinated Sci Lab, Urbana, IL 61801 USA
基金
美国国家科学基金会;
关键词
imaging; inverse problems; inverse scattering; microscopy; near-field optics; scanning probe microscopy; tomography;
D O I
10.1109/JSTQE.2006.879567
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present the theoretical foundation for near-field scanning optical tomography, a method for three-dimensional optical imaging with subwavelength resolution. An analysis of the forward problem for both scalar and vector optical fields is described. This is followed by the construction of the pseudoinverse solution to the linearized inverse scattering problem. The results are illustrated by numerical simulations.
引用
收藏
页码:1072 / 1082
页数:11
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