Uncertainty Evaluation and Comparison of Nanoscale Measurement Instruments

International recognition of a state national standard of units of physical quantities and confirmation of its metrological characteristics (MC) is possible only on the basis of international comparisons with corresponding national standards of other countries. This paper presents the results of the preparation for comparisons in the nanometer range of measurements using scanning electron microscopes. The measuring instrument intended for the comparisons is a measure of M5-4 model, ser.N(2)008. The issues of pre-calibration on the test object, which is a measure of WPSM-2.0K type, are considered. The test object allows determining all microscope parameters in the nanoscale range from 5 nm to 700 nm. An uncertainty budget is calculated in accordance with the Uncertainty Evaluation Guide. An algorithm and sequences for calculating the degree of equivalence of the comparison results are described.