Modeling and performance of uncoated microcantilever-based chemical sensors

被引：30

作者：

Tetin, Sebastein ^{[1
]}

Caillard, Benjamin ^{[1
]}

Menil, Francis ^{[1
]}

Debeda, Helene ^{[1
]}

Lucat, Claude ^{[1
]}

Pellet, Claude ^{[1
]}

Dufour, Isabelle ^{[1
]}

机构：

[1] Univ Bordeaux, IMS Lab, F-33405 Talence, France

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2010年 / 143卷 / 02期

关键词：

Resonant microcantilever; Chemical detection; Gas mass density; Gas viscosity; Binary mixture;

D O I：

10.1016/j.snb.2009.09.062

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Chemical sensors based on vibrating Silicon microcantilevers without sensitive coating are investigated herein. The sensor signal is the relative variation of the microcantilever resonant frequency which depends on both the viscosity and the density of the fluid surrounding the microcantilever. This principle has been applied to the detection of binary gas Mixtures. Experimental data for He/N-2 and CO2/N-2 environments are presented and compared to results of theoretical modeling. The advantages of such a gas sensor based on changes of physical properties are discussed (response time, sensitivity, selectivity, stability). (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：555 / 560

页数：6

共 50 条

[41] MATHEMATICAL MODELING OF MICROCANTILEVER-BASED BIOSENSOR AS A NONUNIFORM RECTANGULAR PLATE FOR DETECTION OF ULTRASMALL ADSORBED MASS
Faegh, Samira
Jalili, Nader
[J]. PROCEEDINGS OF THE ASME 5TH ANNUAL DYNAMIC SYSTEMS AND CONTROL DIVISION CONFERENCE AND JSME 11TH MOTION AND VIBRATION CONFERENCE, DSCC 2012, VOL 3, 2013, : 637 - 643
[42] A novel method for simultaneous readout of static bending and multimode resonance-frequency of microcantilever-based biochemical sensors
Nieradka, Konrad
Gotszalk, Teodor Pawel
Schroeder, Grzegorz
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 2012, 170 : 172 - 175
[43] DESIGN AND FABRICATION OF A MICROCANTILEVER-BASED SENSOR FOR NERVE GAS DETECTION
Li, Chengzhang
Miller, Michele H.
Nayyar, Jaspreet Singh
Velayudham, Singaravelu
Bergstrom, Paul L.
Liu, Haiying
[J]. PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION (IMECE 2010), VOL 10, 2012, : 627 - 634
[44] Label free detection of vitamin D by microcantilever-based aptasensor
Alzahrani, Khalid E.
Al-Gawati, Mahmoud
Assaifan, Abdulaziz K.
Alodhayb, Abdullah
Alotaibi, Khalid
Alswieleh, Abdullah
Albrithen, Hamad
Alanazi, Amal F.
[J]. JOURNAL OF KING SAUD UNIVERSITY SCIENCE, 2023, 35 (10)
[45] A novel method for simultaneous readout of static bending and multimode resonance-frequency of microcantilever-based biochemical sensors
Nieradka, Konrad
Gotszalk, Teodor Pawel
Schroeder, Grzegorz Marek
[J]. EUROSENSORS XXIV CONFERENCE, 2010, 5 : 910 - 913
[46] Estimating gas concentration using a microcantilever-based electronic nose
Leis, John
Zhao, Weichang
Pinnaduwage, Lal A.
Gehl, Anthony C.
Allman, Steve L.
Shepp, Allan
Mahmud, Ken K.
[J]. DIGITAL SIGNAL PROCESSING, 2010, 20 (04) : 1229 - 1237
[47] The deformation of microcantilever-based infrared detectors during thermal cycling
Lin, I-Kuan
Zhang, Yanhang
Zhang, Xin
[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2008, 18 (07)
[48] Microcantilever-based current balance for precise measurement of the photon force
Pruchnik, Bartosz
Orlowska, Karolina
Swiadkowski, Bartosz
Gacka, Ewelina
Sierakowski, Andrzej
Janus, Pawel
Gotszalk, Teodor
[J]. SCIENTIFIC REPORTS, 2023, 13 (01)
[49] Feedback-induced phase noise in microcantilever-based oscillators
Malo, Javier
Izpura, Jose-Ignacio
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 2009, 155 (01) : 188 - 194
[50] Inaccuracy in the detection of molecules using two microcantilever-based methods
Luo, C
[J]. JOURNAL OF APPLIED MECHANICS-TRANSACTIONS OF THE ASME, 2005, 72 (04): : 617 - 619

← 1 2 3 4 5 →