Laser Microfabrication of Metal Surfaces by Tightly Focused Higher-Order Vector Beams

被引：0
|
作者：
Sato, Masaki [1 ,2 ]
Kozawa, Yuichi [1 ]
Sato, Shunichi [1 ]
机构：
[1] Tohoku Univ, Inst Multidisciplinary Res Adv Mat, Katahira 2-1-1, Sendai, Miyagi 9808577, Japan
[2] Tohoku Univ, Grad Sch Engn, Dept Mat Sci, Aoba Ku, Aramaki Aza Aoba 6-6-02, Sendai, Miyagi 9808579, Japan
来源：
2020 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2020年
关键词：
D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We present an experimental study on laser microfabrication of metal surfaces by using femtosecond, higher-order vector beams. The contribution of the longitudinal electric field in laser ablation depends on target material. (C) 2020 The Author(s)
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页数：2
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