Gravity effect on dissolution and growth of GaSb by liquid-phase epitaxy

被引:0
|
作者
Kanai, H [1 ]
Kimura, M [1 ]
Dost, S [1 ]
Tanaka, A [1 ]
Sukegawa, T [1 ]
机构
[1] SHIZUOKA UNIV,ELECT RES INST,HAMAMATSU,SHIZUOKA 432,JAPAN
关键词
D O I
10.1016/S0022-0248(96)01109-8
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The effect of gravity on both dissolution and growth of GaSb in Ga-Sb system has been investigated using a horizontal ''sandwich'' system consisting of a substrate-solution-substrate configuration. It was found that the dissolution of the lower substrate was much larger than that of the upper one, while the thickness of the epitaxial layer on the upper substrate was larger than that on the lower substrate. These phenomena were attributed to the solutal convection driven by concentration gradient. In order to observe such a phenomenon, the solute must have a smaller density than that of solvent. To confirm this point, it was demonstrated that epitaxial layers of GaSb could be grown by the yo-yo solute feeding method.
引用
收藏
页码:226 / 229
页数:4
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