Mechanochemical Effects of Adsorbates at Nanoelectromechanical Switch Contacts

被引:7
|
作者
Yang, Fan [1 ]
Yang, Jing [2 ,6 ]
Qi, Yubo [2 ,7 ]
de Boer, Maarten P. [4 ]
Carpick, Robert W. [3 ]
Rappe, Andrew M. [2 ]
Srolovitz, David J. [1 ,3 ,5 ]
机构
[1] Univ Penn, Dept Mat Sci & Engn, 3231 Walnut St, Philadelphia, PA 19104 USA
[2] Univ Penn, Dept Chem, Philadelphia, PA 19104 USA
[3] Univ Penn, Dept Mech Engn & Appl Mech, Philadelphia, PA 19104 USA
[4] Carnegie Mellon Univ, Dept Mech Engn, Pittsburgh, PA 15213 USA
[5] City Univ Hong Kong, Dept Mat Sci & Engn, Kowloon, Hong Kong, Peoples R China
[6] MIT, Dept Chem Engn, 77 Massachusetts Ave,Room 66-350, Cambridge, MA 02139 USA
[7] Rutgers State Univ, Dept Phys & Astron, 136 Frelinghuysen Rd, Piscataway, NJ 08854 USA
基金
美国国家科学基金会;
关键词
multi-cycle contact; adsorbates; molecular dynamics; mechanochemistry; NEMS switch; conductance; SURFACE; DYNAMICS; ADHESION; TEMPERATURE; SIMULATION; ROUGHNESS; RELAYS; MODELS; FIELD;
D O I
10.1021/acsami.9b09707
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Herein, classical molecular dynamics simulations are used to examine nanoscale adsorbate reactions during the cyclic opening and closing of nano-electromechanical system (NEMS) switches. We focus upon how reactions change metal/metal conductive contact area, asperity morphology, and plastic deformation. We specifically consider Pt, which is often used as an electrode material for NEMS switches. The structural evolution of asperity contacts in gaseous environments with molecules which can potentially form tribopolymers is determined by various factors, for example, contact forces, partial pressure and molecular weight of gas, and the fundamental reaction rates of surface adsorption and adsorbate linkages. The modeled systems exhibit significant changes during the first few cycles, but as the number of contact cycles increases, the system finds a steady-state where the morphologies, Pt/Pt contact area, oligomer chain lengths, amount of Pt transfer between opposing surfaces, and deformation rate stabilize. The stress generated during asperity contact increases the rate of reactions among the adsorbates in the contact region. This makes the size of the adsorbate molecules increase and thus more exposed metal, which implies higher electrical conductance in the closed contact, but more plastic deformation, metal-metal transfer, and mechanical work expended in each contact cycle.
引用
收藏
页码:39238 / 39247
页数:10
相关论文
共 50 条
  • [1] Switch on, switch off: stiction in nanoelectromechanical switches
    Wagner, Till J. W.
    Vella, Dominic
    [J]. NANOTECHNOLOGY, 2013, 24 (27)
  • [2] Nanoelectromechanical switch employing nanowires
    Al Ahmad, Mahmoud
    Habtoun, Sabrina
    Bergaud, Christian
    Dilhan, Monique
    Bourrier, David
    Plana, Robert
    [J]. 2007 INTERNATIONAL SEMICONDUCTOR DEVICE RESEARCH SYMPOSIUM, VOLS 1 AND 2, 2007, : 262 - 263
  • [3] Deformation characterization of a nanoelectromechanical switch
    Gu, Y. T.
    Zhang, L. C.
    [J]. INTERNATIONAL MEMS CONFERENCE 2006, 2006, 34 : 118 - 123
  • [4] Amorphous Metal Based Nanoelectromechanical Switch
    Mayet, Abdulilah
    Smith, Casey
    Hussain, Muhammad M.
    [J]. 2013 SAUDI INTERNATIONAL ELECTRONICS, COMMUNICATIONS AND PHOTONICS CONFERENCE (SIECPC), 2013,
  • [5] Nanoelectromechanical switch with low voltage drive
    Jang, J. E.
    Cha, S. N.
    Choi, Y.
    Butler, T. P.
    Kang, D. J.
    Hasko, D. G.
    Jung, J. E.
    Jin, Y. W.
    Kim, J. M.
    Amaratunga, G. A. J.
    [J]. APPLIED PHYSICS LETTERS, 2008, 93 (11)
  • [6] Nanoelectromechanical Microwave Switch Based on Graphene
    Sharma, Pankaj
    Carrier, Julien Perruisseau
    Ionescu, Adrian M.
    [J]. 2013 14TH INTERNATIONAL CONFERENCE ON ULTIMATE INTEGRATION ON SILICON (ULIS), 2013, : 190 - 193
  • [7] A Nanoelectromechanical Single-Atom Switch
    Martin, Christian A.
    Smit, Roel H. M.
    van der Zant, Herre S. J.
    van Ruitenbeek, Jan M.
    [J]. NANO LETTERS, 2009, 9 (08) : 2940 - 2945
  • [8] Carbon-nanotuble-based nanoelectromechanical switch
    Kang, JW
    Byun, KR
    Song, KO
    Hwang, HJ
    [J]. DEVICE AND PROCESS TECHNOLOGIES FOR MICROELECTRONICS, MEMS, AND PHOTONICS IV, 2006, 6037
  • [9] Carbon-Carbon Contacts for Robust Nanoelectromechanical Switches
    Loh, Owen
    Wei, Xiaoding
    Sullivan, John
    Ocola, Leonidas E.
    Divan, Ralu
    Espinosa, Horacio D.
    [J]. ADVANCED MATERIALS, 2012, 24 (18) : 2463 - 2468
  • [10] A Dual-silicon-nanowire Based Nanoelectromechanical Switch
    Qian, You
    Lou, Liang
    Pott, Vincent
    Tsai, Minglin Julius
    Lee, Chengkuo
    [J]. PROCEEDINGS OF THE 2013 IEEE 5TH INTERNATIONAL NANOELECTRONICS CONFERENCE (INEC), 2013, : 350 - 352