Carbon-Carbon Contacts for Robust Nanoelectromechanical Switches

被引：36

作者：

Loh, Owen ^{[1
]}

Wei, Xiaoding ^{[1
]}

Sullivan, John ^{[2
]}

Ocola, Leonidas E. ^{[3
]}

Divan, Ralu ^{[3
]}

Espinosa, Horacio D. ^{[1
]}

机构：

[1] Northwestern Univ, Dept Mech Engn, Evanston, IL 60208 USA

[2] Sandia Natl Labs, Ctr Integrated Nanotechnol, Albuquerque, NM 87185 USA

[3] Argonne Natl Labs, Ctr Nanoscale Mat, Argonne, IL 60439 USA

来源：

ADVANCED MATERIALS | 2012年 / 24卷 / 18期

基金：

美国国家科学基金会;

关键词：

diamond-like carbon; nanoscale devices; nanoelectromechanical systems; NANOTUBE; DEVICES; MEMORY; RESISTANCE;

D O I：

10.1002/adma.201104889

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Nanoelectromechanical devices exhibiting dramatically improved robustness through novel material selection are demonstrated. A unique combination of carbon nanotube active elements and conductive diamond-like carbon contact electrodes results in reliable switching performance not found in devices with ubiquitously-used metal thin film electrodes. This in turn represents a viable means to improve the reliability of a diverse, and widely-pursued class of nanoscale devices ranging from single-nanostructure switches to massively parallel arrays.

引用

页码：2463 / 2468

页数：6

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